Ethylene - Semiconductor Grade
C2H4
High purity ethylene is produced from lower purity material by a combination of purification techniques including molecular sieve and cryogenic fractional distillation. It is used to replenish carbon in the dielectric layers of the chip which may have been damaged during etch processes.
Standard Specifications
| Purity / Assay Impurities (Mol ppm) | 4.5 99.995% | 5.0 99.999% | 5.5 99.9995% |
|---|---|---|---|
| Nitrogen | < 5 | < 2 | < 1 |
| Oxygen | < 2 | < 2 | < 1 |
| Carbon Dioxide | < 5 | < 2 | < 1 |
| Carbon Monoxide | < 2 | < 2 | < 1 |
| Other Hydrocarbons | < 40 | < 8 | < 4 |
| Acetylene | < 4 | < 2 | < 1 |
| Moisture** | < 5 | < 3 | < 1 |
| Total Impurities | < 50 | < 10 | < 5 |
Please contact us if the specification you require is not shown above. AGT International is able to custom manufacture different specifications according to your requirements.
Standard Cylinder Sizes and Fill Volumes
| Cylinder Information | |
|---|---|
| Cylinder Size | Fill Volume (kg) |
| H50 | 16.9 |
| H49 | 16.8 |
If you require a different container size please contact us.
Technical Information
| Technical Data | Shipping Information | ||
|---|---|---|---|
| Molecular Weight (g/mol) | 28.054 | Shipping Name | Ethylene |
| Liquid Density (kg/m³) | 567.9 | Hazard Class | 2.1 |
| Gas Density (kg/m³) | 1.178 | UN No. | UN 1962 |
| Boiling point (°C) | -103.8 | Hazard Label | Flammable gas |
| Specific Volume (m³/kg) | 0.862 | CAS No. | 74-85-1 |
| Vapour Pressure (bar.a @ 20°C) | 47.7 | ||
| Valve Outlet | CGA 510 / BS 4 / DIN 1 |