Ethane - Semiconductor Grade


Ethane is manufactured by direct hydrogenation of ethylene at high temperature in the presence of a catalyst. It is further purified using fractional distillation. It is used in etch modulation as well as other processes. Ethane mixtures can be used to etch compound semiconductors.

Standard Specifications

Purity / Assay
Impurities (Mol ppm)
Nitrogen< 3< 1
Oxygen< 1< 1
CO / CO2< 2< 1
Other hydrocarbons< 6< 3
Moisture **< 3< 1
Total Impurities< 10< 5

Please contact us if the specification you require is not shown above. AGT International is able to custom manufacture different specifications according to your requirements.

Standard Cylinder Sizes and Fill Volumes

Cylinder Information
Cylinder SizeFill Volume (kg)

If you require a different container size please contact us.

Technical Information

Technical DataShipping Information
Molecular Weight (g/mol)30.069Shipping NameEthane
Liquid Density (kg/m³)546.5Hazard Class2.1
Gas Density (kg/m³)1.282UN No.UN 1035
Boiling point (°C)-88.7Hazard LabelFlammable gas
Specific Volume (m³/kg)0.799CAS No.79-84-0
Vapour Pressure (bar.a @ 20°C)38.3
Valve OutletCGA 510 / BS 4 / DIN 1