Ethane - Semiconductor Grade
C2H6
Ethane is manufactured by direct hydrogenation of ethylene at high temperature in the presence of a catalyst. It is further purified using fractional distillation. It is used in etch modulation as well as other processes. Ethane mixtures can be used to etch compound semiconductors.
Standard Specifications
| Purity / Assay Impurities (Mol ppm) | 5.0 99.999% | 5.5 99.9995% |
|---|---|---|
| Nitrogen | < 3 | < 1 |
| Oxygen | < 1 | < 1 |
| CO / CO2 | < 2 | < 1 |
| Other hydrocarbons | < 6 | < 3 |
| Moisture ** | < 3 | < 1 |
| Total Impurities | < 10 | < 5 |
Please contact us if the specification you require is not shown above. AGT International is able to custom manufacture different specifications according to your requirements.
Standard Cylinder Sizes and Fill Volumes
| Cylinder Information | |
|---|---|
| Cylinder Size | Fill Volume (kg) |
| H50 | 17.5 |
| H49 | 16.8 |
If you require a different container size please contact us.
Technical Information
| Technical Data | Shipping Information | ||
|---|---|---|---|
| Molecular Weight (g/mol) | 30.069 | Shipping Name | Ethane |
| Liquid Density (kg/m³) | 546.5 | Hazard Class | 2.1 |
| Gas Density (kg/m³) | 1.282 | UN No. | UN 1035 |
| Boiling point (°C) | -88.7 | Hazard Label | Flammable gas |
| Specific Volume (m³/kg) | 0.799 | CAS No. | 79-84-0 |
| Vapour Pressure (bar.a @ 20°C) | 38.3 | ||
| Valve Outlet | CGA 510 / BS 4 / DIN 1 |