Carbonyl Sulfide – Semiconductor Grade


Carbonyl sulphide is manufactured by a chemical synthesis method and then purified by distillation. It is used as a sulfur containing precursor in MOCVD.

Standard Specifications

Purity / Assay
Impurities (Mol ppm)
Hydrogen< 5 ppmv
Nitrogen< 100 ppmv
Oxygen< 100 ppmv
Carbon Disulphide< 100 ppmv
Moisture< 100 ppmv
CO< 30 ppmv
CO2< 300 ppmv
Methane< 10 ppmv
Total Impurities< 1000 ppmv

Please contact us if the specification you require is not shown above. AGT International is able to custom manufacture different specifications according to your requirements.

Standard Cylinder Sizes and Fill Volumes

Cylinder Information
Cylinder SizeFill Volume (kg)

If you require a different container size please contact us.

Technical Information

Technical DataShipping Information
Molecular Weight (g/mol)60.07Shipping NameCarbonyl Sulphide
Liquid Density (kg/m³)1178Hazard Class2.1
Gas Density (kg/m³)3.2UN No.UN 2204
Boiling point (°C)-50.23Hazard LabelFlammable gas
Specific Volume (m³/kg)0.406CAS No.463-58-1
Vapour Pressure (bar.a @ 20°C)3.4
Valve OutletCGA 330