Carbonyl Sulfide – Semiconductor Grade
COS
Carbonyl sulphide is manufactured by a chemical synthesis method and then purified by distillation. It is used as a sulfur containing precursor in MOCVD.
Standard Specifications
| Purity / Assay Impurities (Mol ppm) | 3.0 99.9% |
|---|---|
| Hydrogen | < 5 ppmv |
| Nitrogen | < 100 ppmv |
| Oxygen | < 100 ppmv |
| Carbon Disulphide | < 100 ppmv |
| Moisture | < 100 ppmv |
| CO | < 30 ppmv |
| CO2 | < 300 ppmv |
| Methane | < 10 ppmv |
| Total Impurities | < 1000 ppmv |
Please contact us if the specification you require is not shown above. AGT International is able to custom manufacture different specifications according to your requirements.
Standard Cylinder Sizes and Fill Volumes
| Cylinder Information | |
|---|---|
| Cylinder Size | Fill Volume (kg) |
| H44 | 25 |
| H3 | 1.5 |
If you require a different container size please contact us.
Technical Information
| Technical Data | Shipping Information | ||
|---|---|---|---|
| Molecular Weight (g/mol) | 60.07 | Shipping Name | Carbonyl Sulphide |
| Liquid Density (kg/m³) | 1178 | Hazard Class | 2.1 |
| Gas Density (kg/m³) | 3.2 | UN No. | UN 2204 |
| Boiling point (°C) | -50.23 | Hazard Label | Flammable gas |
| Specific Volume (m³/kg) | 0.406 | CAS No. | 463-58-1 |
| Vapour Pressure (bar.a @ 20°C) | 3.4 | ||
| Valve Outlet | CGA 330 |